Wafer Bonding

Finite element modeling of residual mechanical stress in partial SOI structure due to wafer bonding processing

CONFERENCE PAPERS

Low temperature wafer bonding in medium vacuum

CONFERENCE PAPERS

Silicon-to-silicon wafer bonding by tempered sol-gel intermediate layer

CONFERENCE PAPERS

Silicon-to-silicon wafer bonding efficiency by sol-gel process

CONFERENCE PAPERS

Influence of applied load on wafer bonding in vacuum

CONFERENCE PAPERS

Influence of plasma treatment and cleaning on vacuum wafer bonding

CONFERENCE PAPERS

Low temperature silicon wafer bonding by sol-gel processing

CONFERENCE PAPERS

Influence of super-thin oxide layer on device fabricated on partial SOI substrate

CONFERENCE PAPERS